VAT 65044-PACW ISO-160 - REBUILT
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REBUILT_65044-PACW
VAT 65044-PACW DN ISO-160 Vacuum Pendulum Control Valve
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.
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| Type | Label | Description | Download |
|---|---|---|---|
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VAT Series 650 - REBUILT | Installation, Operating & Maintenance Instructions | Download |
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