VAT 65046-PA52 ISO-200 - REBUILT
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SKU
REBUILT_65046-PA52
VAT 65046-PA52 DN ISO-200 Vacuum Pendulum Control Valve
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.
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| Inside diameter (ID) in mm | DN 200 |
| Flange | ISO-F (compatible with ISO 1609) |
| Body material | Aluminum |
| Actuator | Stepper motor |
| Pressure min. | 1 x 10-8 mbar |
| Pressure max. | 1.2 bar (abs) |
| Feedthrough | Rotary feedthrough (actuator), Shaft feedthrough (sealing ring) |
| Sealing technology | SEALRING-System |
| Sealhead description | FKM (VITON®) |
| Sealing materials | FKM (VITON®) |
| Molecular flow conductance l/s | 12,000 |
| Min. controllable conductance | 10 |
| Max. differential pressure closed position in bar | 1.2 |
| Max. pressure on seat side during opening in bar | 0.005 |
| Compressed air pressure max. in bar | 7 |
| Compressed air pressure min. in bar | 4 |
| Closing or opening time in sec. | 3 / 4 |
| Valve body temperature max. in °C | 120 |
| Actuator temperature max. in °C | 50 |
| Weight in kg / lbs | 22 / 48.5 |
| Type | Label | Description | Download |
|---|---|---|---|
|
VAT Series 650 - REBUILT | Installation, Operating & Maintenance Instructions | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
VAT Fabrication No. 65046-PA52 DN ISO-200 Vacuum Pendulum Control Valve"