VAT 65048-JH52 DN 250 JIS - REBUILT
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REBUILT_65048-JH52
VAT 65048-JH52 DN 250 JIS Vacuum Pendulum Control Valve
Optimized for corrosive semiconductor and FPD processes (e. g. etching) and for cleaning processes between deposition processes. In control mode, the valve works virtually particle-free. Maintenance can be done easy and fast.
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| Type | Label | Description | Download |
|---|---|---|---|
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VAT Series 650 - REBUILT | Installation, Operating & Maintenance Instructions | Download |
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