Adixen Alcatel A 604 H - REBUILT
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| Weight | 900 lbs |
|---|---|
| Pumping Speed | 560 m3/h |
| Ultimate Pressure | 2 x 10-3 mbar |
Pfeiffer Adixen A 604 H A4 Series Semiconductor Dry Vacuum Pump - REBUILT
Pfeiffer Vacuum introduces the new A4 series. Harsh duty processes in semiconductor production always provide new challenges for vacuum pumps. Based on the proven and energy efficient multi-stage Roots technology, the A4 series offers a wide range of dry pump solutions, with different pumping speeds from 100 to 2,300 m3/h. Compared to previous process pumps, the corrosion and by-product condensation resistance have been increased significantly to address the latest requirements of 20 nm technology nodes and below. With an extended process lifetime - associated with a low power consumption - the A4 series pumps are counted among those with the lowest cost of ownership in the market.
Pfeiffer Adixen has more information on multi-stage dry pumps. We also offer repair service.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Max. peak pumping speed - N2 | 560 m3/h |
| Max. ultimate pressure (no purge) | 2 x 10-3 hPa |
| Max. ultimate pressure (50 slm purge) | 6 x 10-3 hPa |
| Max. continuous inlet flow at full rotational speed | 60 slm |
| Power supply | 200–230 V / 380–480 V, 3-phase ± 10%, 50/60 Hz |
| Power consumption at ultimate pressure - no exhaust heater | 2.0 kW |
| Max. exhaust overpressure | 1,200 hPa |
| Cooling water flow | 2.5 – 4 l/mn |
| Cooling water temperature - subject to pump T° setting | 10 to 35°C |
| Water connect | 3/8 NPT |
| N2 purge flow | 10 to 120 slm |
| Operating temperature | 5 to 40°C |
| Inlet flange | DN 100 ISO-K |
| Exhaust flange | DN 40 ISO-KF |
| Dimensions | 962 x 388 x 775 mm |
| Weight | 370 kg |
| Max. vibration level at pump inlet flange | < 0.1 g / 1.5 mm/s |
| Max. noise level at ultimate pressure | < 68 dB(A) |
Specifications
| Type | Label | Description | Download |
|---|---|---|---|
|
Pfeiffer A4 Series - REBUILT | Operating Instructions | Download |
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Pfeiffer Adixen A 604 H A4 Series Semiconductor Dry Vacuum Pump - REBUILT
