VAT 64246-UE52 10" OD CF - REBUILT

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SKU
REBUILT_64246-UE52

VAT 64246-UE52 Series 642 DN 200 10" OD Conflat Vacuum Throttle Control Gate Valve

For semiconductor, FPD and industrial processes, e.g. sputtering and etching systems.

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Inside diameter (ID) in mm 200 
Flange CF-F fixed flange UNF threads (compatible with ISO 3669)
Body material Stainless steel
Actuator Stepper motor
Solenoid No
Position indicator No
Pressure min. 1 x 10-8 mbar
Pressure max. 2.0 bar (abs)
Feedthrough Rotary feedthrough
Sealing technology VATLOCK-System
Sealhead description FKM (VITON®)
Sealing materials FKM (VITON®)
Molecular flow conductance l/s 12,000
Min. controllable conductance 2
Max. differential pressure closed position in bar 2
Max. pressure on seat side during opening in bar     0.03
Closing or opening time in sec. 6
Valve body temperature max. in °C 150
Actuator temperature max. in °C 50
Position Indicator temp. max. in °C 80
Weight in kg / lbs 34 / 74.96
Type Label Description Download
VAT Series 64.2, DN 160 - 400 - REBUILT Installation, Operating & Maintenance Instructions Download

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VAT Fabrication No. 64246-UE52 Series 642 DN 200 10"" OD Conflat Vacuum Throttle Control Gate Valve
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