SEREN IPS RF - SERVICE

90 day warranty repair service and testing on most SEREN IPS RF plasma power supplies.

AT Series

• AT-3
• AT-6NVL, AT-6/100, AT-6/500, ATS-6M
• AT-10
• AT-25NVL
• AT-30
• AT-50/75, AT-50/125, AT-50/140, AT-50/180
• MC-2

HR Series

• HR601

I Series

• I1600, I1600-D 
• I2000, I2000-D

L Series

• L301 
• L601 
• L1001 
• L2001 
• L3001

R Series

• R301 
• R601 
• R1001, R1001/1.2 
• R2001, R2001-2, R2001-13, R2001-H 
• R3001, R3001-2 
• R5001, R5001-2, R5001-13
• R10001

Request an RMA Return Material Authorization

Questions? Please call our toll free number at 866-332-0500 or send an e-mail to our sales team!