Edwards STP-XA4503C - REBUILT
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| Weight | 231 lbs |
|---|---|
| Pumping Speed | 3,800 to 4,300 l/s |
| Ultimate Pressure | 10-9 torr |
Edwards STP-XA4503C Turbomolecular Vacuum Pump - REBUILT
An STP pump can be installed in any orientation and operate by remote control. If any rotor imbalance occurs (by deposition of process by-products, for example) sensors detect changes in its motion and compensate the magnetic fields accordingly. There are backup precision mechanical bearings to protect the pump in the event of a total disruption of magnetic suspension or a sudden massive air inrush that overcomes the magnetic bearing stiffness.
Model names ending in a C are corrosion-resistant, with nickel-coated rotors and stators and a nitrogen purge port. Ones with a prefix of H or A are high throughput pumps incorporating a hybrid pumping mechanism for higher gas flow. These are optimized for processes such as plasma etch. We also offer repair service.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange size | VF-300 / ISO-320F / VG-350 |
| Backing port size | KF-40 |
| Pumping speed | |
| N2 | 3,800 to 4,300 l/s (dependant on model) |
| H2 | 2,500 l/s |
| Compression ratio | |
| N2 | > 108 |
| H2 | 6 x 103 |
| Ultimate pressure | 10-7 Pa (10-9 Torr) |
| Max allowable backing pressure | 266 Pa (2 Torr) |
| Max allowable gas flow N2 (Water cooled only) |
2,800 sccm |
| 4.73 Pam3s-1 | |
| Maximum allowable gas flow Ar (Water cooled only) |
2,150 sccm |
| 3.63 Pam3s-1 | |
| Rated speed | 24,000 rpm |
| Run up time to 90% rated speed | 12 minutes |
| Mounting position | Any orientation |
| Water cooling | |
| Flow | 3 l/min-1 |
| Temperature | 5 - 25°C (41 - 77°F) |
| Pressure | 0.3 MPa |
| Recommended purge gas flow N2 | 50 sccm / 8.4 x 10-2 Pam3s-1 |
| Input voltage | 200 - 240 ±10 % VAC |
| Maximum input power (w/out TMS) | 1.5 KVA |
Specs link
| Type | Label | Description | Download |
|---|---|---|---|
|
Edwards STP Series - REBUILT | Instruction Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards STP-XA4503C Turbomolecular Vacuum Pump - REBUILT P/N PT67-0Z-070 / PT670Z070
