Edwards STP-A1603C PT465Z100 - REBUILT
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In stock
SKU
RB_STPA1603C-PT465Z100
| Weight | 78 lbs |
|---|---|
| Pumping Speed | 1,600 l/s |
| Ultimate Pressure | 1 x 10-9 torr |
Edwards Seiko Seiki STP-A1603C Turbomolecular Vacuum Pump - REBUILT
The small and powerful Edwards STP-A1603C turbomolecular pump has been designed using Edwards advanced rotor technology. This provides high throughput, maximum reliability and class leading performance which is demanded by the latest generation of semiconductor processes. Its half rack controller and compact design provide considerable space saving, whilst its advanced deposition reduction system gives improved reliability and performance. The STP-A1603C has been qualified on the latest 200 mm etch tools as well as on new generation 300 mm oxide etch processes.
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