Edwards iF1800 - REBUILT

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In stock
SKU
REBUILT_iF1800
Weight 1290 lbs
Pumping Speed 1720 m3/h
Ultimate Pressure 8 x 10-4 mbar

Edwards iF1800 Semiconductor Dry Vacuum Pump - REBUILT

Edwards iH and iF system dry pumps are designed specifically for difficult semiconductor processes that produce unwanted by-products or corrosion. The Edwards iL model is an economy version which cannot tolerate as much process contamination. We also offer repair service.

  • Gas Module: controls nitrogen purges and monitors exhaust pressure.
  • Dry Pump Control Module: controls the gas module, interprets signals from thermocouples and other sensors, and activates warning and alarms when necessary.
  • Electrics Module: used for low voltage power requirements.
  • Dry Pump Display Terminal: hand-held module (game boy) normally kept above the electronics enclosure which allows simple local monitoring and control.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Parameter 50 Hz 60 Hz
Typical peak pumping speed 1,720 m3h-1 1,800 m3h-1
Typical ultimate vacuum with shaft seals purge only (50 and 60 Hz) 8 x 10-4 mbar
0.08 Pa
5 x 10-4 mbar
0.05 Pa
Maximum inlet pressure (50 and 60 Hz) Atmospheric mbar / Pa
Maximum operating time at maximum inlet pressure (50 and 60 Hz) 60 seconds
Inlet connection ISO160
Outlet connection NW40
Mass 585 kg
Noise level measured at 1 m from the pump (with enclosure panels fitted) < 64 dB(A) < 69 dB(A)
Warm-up time to nominal pumping performance 15 min
Minimum warm-up time to process gas pumping 4 hours
Vacuum system maximum leak-rate 1 x 10-5 mbar l/s (1 x 10-3 Pa l/s)
Exhaust system maximum leak-rate 1 x 10-5 mbar l/s (1 x 10-3 Pa l/s)
Ambient operating temperature range 5 to 40°C
Maximum ambient operating humidity 90% RH

Specifications

Type Label Description Download
Edwards iF1800 - REBUILT Instruction Manual Download

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

Edwards iF1800 Semiconductor Dry Vacuum Pump - REBUILT

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