Edwards EXT75DX - REBUILT
| Weight | 20 lbs |
|---|---|
| Pumping Speed | 42-61 l s-1 |
| Ultimate Pressure | 5 x 10-9 mbar |
Edwards EXT75DX Compound Turbomolecular Vacuum Pump - REBUILT
The EXT75DX is a hybrid bearing compound turbo pump that combines the proven technology of a ceramic mechanical lower bearing, a dry permanent magnetic upper bearing and Holweck drag stage with the added convenience of an on-board 24V controller allowing parallel and serial communication compatible with our TAG and TIC controllers. It is available with either a DN 40 NW, ISO-63, DN 63 CF or an ISO-100 inlet flange with an N2 pumping speed of up to 66l/s. A basic pump system would require an EXT75DX pump, a TAG or TIC controller, either an air or water cooling accessory and a suitable backing pump.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Inlet flange | DN 63 ISO-K / DN 63 CF / DN 40 NW / DN 100 ISO-K |
| Pumping Speed | |
| N2 ISO-63 / 63 CF (DN 40 NW) (ISO-100) | 61 l/s (42 l/s) (66 l/s) |
| He ISO-63 / 63 CF (DN 40 NW) (ISO-100) | 57 l/s (49 l/s) (59 l/s) |
| H2 ISO-63 / 63 CF (DN 40 NW) (ISO-100) | 53 l/s (48 l/s) (54 l/s) |
| Compression ratio | |
| N2 | > 1 × 1011 |
| He | 1 x 106 |
| H2 | 5 x 104 |
| Ultimate Pressure (mbar) | |
| w/ RV backing pump ISO / CF | < 5 x 10-9 / 5 x 10-10 |
| w/ diaphragm backing pump ISO/CF | < 5 x 10-8 / 5 x 10-9 |
| Outlet flange | DN 16 NW |
| Recommended backing pump* | RV5 / nXDS6i |
| Vent port | 1/8 inch BSP |
| Purge port | 1/8 inch BSP |
| Max continuous inlet pressure (light gas pumping)† | |
| Water cooling (water at 15°C, ambient temp at 40°C) | 2 × 10-2 mbar |
| Forced air cooled, 35°C ambient | 1 × 10-2 mbar |
| Pump rotational speed | |
| Nominal rotational speed | 90,000 rpm |
| Standby rotational speed | Variable from 49,500 to 90,000 rpm (63,000 rpm default) |
| Programmable power limit settings | Variable from 50-120W (80W default) |
| Start time to 90% speed | 110 s ‡ |
| Analogue outputs | Rotational speed; Power consumption; Pump temp; Controller temp |
| Cooling method# | Forced air / water |
| Ambient air temperature for forced air cooling | 5 - 35°C |
| Min cooling water flow rate (water 15°C) | 15 l h-1 |
| Water temp range | 10 - 20°C |
| Max inlet flange temp | 100°C |
| Operating attitude | Vertical and upright, through to Horizontal |
| Noise level at 1 metre | < 50 dB(A) |
| Max magnetic field pump can tolerate | 5 mT |
| Recommended controller | TIC 100 turbo and instrument controller |
| Quiescent electrical power | 10 W |
* A smaller backing pump may be used depending on application. A suitable diaphragm pump with ultimate <5 mbar may also be used e.g. XDD1.
† Above this inlet pressure
| Type | Label | Description | Download |
|---|---|---|---|
|
BOC Edwards EXT Series - REBUILT | User's Manual | Download |
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
Edwards MODEL: EXT75DX Compound Turbomolecular Vacuum Pump - REBUILT
CODE: B722-35-000 / B72235000 EXT75DX DN 40 NW
CODE: B722-41-000 / B72241000 EXT75DX DN 63 ISO-K
CODE: B722-45-000 / B72245000 EXT75DX DN 100 ISO-K
B722-37-000 / B72237000 EXT75DX DN 63 ISO-K
B722-42-000 / B72242000 EXT75DX DN 63 CF
B722-46-000 / B72246000 EXT75DX DN 100 ISO-K (DN 25 NW Backing)
B722-43-000 / B72243000 EXT75DX DN 40 NW
B722-48-000 / B72248000 EXT75DX ISO-63
Let us know if you just need the power supply.
D396-47-000 / D39647000 
