EBARA ESR80WN - REBUILT
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SKU
REBUILT_ESR80WN
| Weight | 400 lbs |
|---|---|
| Pumping Speed | 300 cfm |
| Ultimate Pressure | 1.5 x 10-3 torr |
EBARA ESR80WN Light Duty Dry Semiconductor Vacuum Pump - REBUILT
The ESR Series (Energy Saving Roots) are multistage dry vacuum pump engineered for application from clean to medium duty processes such as Load Lock, SEM, PVD, Ashing, Sputtering and Etch. The ESR Series covers a wide pumping speed range from 35 ~ 1,625 cfm with an ultimate pressure as low as 1 mTorr.
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Ultimate Pressure | 1.5 × 10-3 |
|---|---|
| Pumping Speed | 300 |
| Motor Power | 6.034599 |
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| Type | Label | Description | Download |
|---|---|---|---|
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EBARA ESR Series - REBUILT | Instruction Manual | Download |
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