EBARA ESR80WN - REBUILT

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In stock
SKU
REBUILT_ESR80WN
Weight 400 lbs
Pumping Speed 300 cfm
Ultimate Pressure 1.5 x 10-3 torr

EBARA ESR80WN Light Duty Dry Semiconductor Vacuum Pump - REBUILT

The ESR Series (Energy Saving Roots) are multistage dry vacuum pump engineered for application from clean to medium duty processes such as Load Lock, SEM, PVD, Ashing, Sputtering and Etch. The ESR Series covers a wide pumping speed range from 35 ~ 1,625 cfm with an ultimate pressure as low as 1 mTorr.

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Pumping speed 50/60 Hz 141 / 300 cfm
4,000 / 8,500 l/min
240 / 510 m3/hr
Ultimate pressure 50/60 Hz 1.5 mTorr
0.2 Pa
0.002 mBar
Gas inlet connection NW 50
Gas outlet connection NW 40
Power at ultimate pressure 0.8 - 1.9 kW
Maximum power 4.5 kW
Cooling water requirements, min. flow rate     2 l/min
Bearing and dilution N2, bearing seals 2 - 12 l/min
Cabinet dimensions, L x W x H 26 x 15 x 25.8 in
660 x 380 x 655 mm
Weight 400 lbs
180 kg

Specification Sheet

Type Label Description Download
EBARA ESR Series - REBUILT Instruction Manual Download

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EBARA ESR80WN Light Duty Dry Semiconductor Vacuum Pump - REBUILT