EBARA EMT390 Mag Lev - NEW

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In stock
SKU
NEW_EMT390
Weight 37 lbs
Pumping Speed 340 l/s
Ultimate Pressure < 7.5 x 10-9 torr

EBARA EMT390 Magnetically Levitated Turbo Vacuum Pump - NEW

The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion resistant, ultra low vibration, radiation resistant, and ultra high vacuum.

The EMT Series turbomolecular pumps features a wide pressure range with maximum back pressure up to 3 Torr.

The temperature controlled model turbomolecular pumps reduce the rate condensation of the byproduct and process effluent build up commonly found inside a turbomolecular pump. The patented thermal insulation structure with integrated temperature management system is the most energy efficient temperature controlled turbomolecular pump on the market today.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Flange Inlet ISO-B100 / CF100
Outlet NW 25
Volume Flow Rate N2 (l/s) 340
N2 with protective screen 320
H2 (l/s) 290
Maximum Compression Ratio N2 1x108
H2 4.5x103
Ultimate Pressure CF / ISO-B Torr < 7.5x10-9
Pa < 1x10-6
Allowable Outlet Pressure Torr 3
Pa 400
Maximum Throughput N(sccm) 2000
N2 (Pa x l/s) 3680
Ar (sccm) 700
Ar (Pa x l/s) 1290
Revolution Speed RPM 40,800
Startup Time Minutes 2 - 3
Shutdown Time Minutes 4 - 5
Installation Position   Any
Vibration Level (0 - peak)7 μm < 0.01
Pump Bake Out Temperature Deg C Max 120
Bearing System 5-axis magnetic bearing
Cooling System Water/Air
Cooling Water Flow Rate L/min 1.5
Recommended Backing pump L/min ≥ 160
N2 Gas Throughput for Purging sscm 10
Pa-l/sec 18.4
Weight ISO-B/CF lb 30/37
kg 14/17

Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.

EBARA EMT390 Magnetically Levitated Turbo Vacuum Pump - NEW