EBARA A30W - REBUILT
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In stock
SKU
REBUILT_A30W
Weight | 728 lbs |
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Pumping Speed | 127.13 cfm |
Ultimate Pressure | 2.25 x 10-3 torr |
EBARA A30W Multi-Stage Dry Vacuum Pump - REBUILT
Technical Characteristics
- Complete pump safeguard system
- High pump operating temperature preventing condensation
- Low noise and low vibration
- Corrosion resistant materials-stainless steel coolers, water circuits
- High reliability even for harsh processes
- Efficient interstage coolers for LPCVD nitride process
- Canned motor
- Low service requirements
- Control panel for monitoring operating conditions
Customer Benefits
- Very low nitrogen consumption for purging
- Clean room compatible
- Low service requirements
- Compact size and small footprint
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
Ultimate Pressure | 2.25019 × 10-3 |
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Pumping Speed | 127.13 |
Motor Power | 2.95025 |
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Type | Label | Description | Download |
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EBARA A Series - REBUILT | Instruction Manual | Download |