EBARA A30W - REBUILT

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In stock
SKU
REBUILT_A30W
Weight 728 lbs
Pumping Speed 127.13 cfm
Ultimate Pressure 2.25 x 10-3 torr

EBARA A30W Multi-Stage Dry Vacuum Pump - REBUILT

Technical Characteristics

  • Complete pump safeguard system
  • High pump operating temperature preventing condensation
  • Low noise and low vibration
  • Corrosion resistant materials-stainless steel coolers, water circuits
  • High reliability even for harsh processes
  • Efficient interstage coolers for LPCVD nitride process
  • Canned motor
  • Low service requirements
  • Control panel for monitoring operating conditions

Customer Benefits

  • Very low nitrogen consumption for purging
  • Clean room compatible
  • Low service requirements
  • Compact size and small footprint

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

More Information
Ultimate Pressure 2.25019 × 10-3
Pumping Speed 127.13
Motor Power 2.95025
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