EBARA A10S - REBUILT
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In stock
SKU
REBUILT_A10S
| Weight | 485 lbs |
|---|---|
| Pumping Speed | 42.38 cfm |
| Ultimate Pressure | 3 x 10-2 torr |
EBARA A10S Multi-Stage Dry Vacuum Pump - REBUILT
Technical Characteristics
- Complete pump safeguard system
- High pump operating temperature preventing condensation
- Low noise and low vibration
- Corrosion resistant materials-stainless steel coolers, water circuits
- High reliability even for harsh processes
- Efficient interstage coolers for LPCVD nitride process
- Canned motor
- Low service requirements
- Control panel for monitoring operating conditions
Customer Benefits
- Very low nitrogen consumption for purging
- Clean room compatible
- Low service requirements
- Compact size and small footprint
Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!
| Ultimate Pressure | 3.00025 × 10-2 |
|---|---|
| Pumping Speed | 42.38 |
Write Your Own Review
| Type | Label | Description | Download |
|---|---|---|---|
|
EBARA A Series - REBUILT | Instruction Manual | Download |