Agilent Varian VHS-6 - REBUILT

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In stock
SKU
REBUILT_VHS6
Weight 75 lbs
Pumping Speed 3,284 cfm
Ultimate Pressure 6.50 x 10-1 Torr

Agilent Varian VHS-6 Diffusion High Vacuum Pump - REBUILT

The Agilent Varian VHS Series bulge contour increases gas capture and maintains lower pressure for the process. These VHS diffusion pumps have sight glass/fill and drain assemblies for continuous monitoring and easy maintenance of pump fluid. Finned boilers increase surface area, prolonging fluid life. Full thermal protection and quick-cool coils are also standard. Please let us know if you would like a quote for a different heater voltage or for repair service of your pump.

We also carry Agilent Varian diffusion pump LN2 traps and baffles and valves.

Questions? Please call our toll free number at 866-332-0500 or send an email to our sales team!

Backstreaming Rate 5 x 10-4 mg/cm²/min
Cooldown Time 10 min
Electrical Requirements 1-phase 50/60 Hz 120/208/240 V
Fluid Charge 500 CC
Fluid Type Oil
Input Voltage 120, 208, 240 V
Maximum Forepressure - Full Load 0.55 Torr / 0.72 mbar
Maximum Forepressure - No Load 0.65 Torr / 0.85 mbar
Maximum Throughput 2.4 T-L/s (3.2 mbar-L/s)
Operating Range 1.5 x 10-3 to <5 x 10-9 Torr
2 x 10-3 to <6.5 x 10-9 mbar
Pump Power 2,200 W
Pump Weight 75 lbs / 34 kg
Pumping Speed - Air 1,550 L/s
Pumping Speed - Air, via AVS 4.1 (1963) 2,400 L/s
Pumping Speed - He/H2 1,930 L/s
Recommended Backing Pump ≥ 17.0 cfm (28.9 m3/hr)
Warmup Time 10 min
Water Connections 1/8 inch FPT
Water Cooling - Temperature Requirement 60-80°F / 15-26°C
Water Cooling Flow Requirement 0.25 gpm / 50 L/hr
Type Label Description Download
Varian VHS-6 - REBUILT Instruction Manual Download

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Agilent Varian VHS-6 Diffusion High Vacuum Pump - REBUILT

85826301 / 85826-301  ASA w/ standard cold cap 2,200W 120V
85826302 / 85826-302  ASA w/ standard cold cap 2,200W 240V single-phase
85826306 / 85826-306  ASA w/ standard cold cap 208V 1-phase
85826311 / 85826-311  ASA w/ extended cold cap 2,200W 120V
85826312 / 85826-312  ASA w/ extended cold cap 240V 1-phase
85826316 / 85826-316  ASA w/ extended cold cap 208V 1-phase
L6193301 / L6193-301  ISO w/ standard cold cap 120V
L6193302 / L6193-302  ISO w/ standard cold cap 240V
L6193306 / L6193-306  ISO w/ standard cold cap 208V
L6193311 / L6193-311  ISO w/ extended cold cap 120V
L6193312 / L6193-312  ISO w/ extended cold cap 240V
L6193316 / L6193-316  ISO w/ extended cold cap 208V