Agilent Varian Turbo-V 2K-G - REBUILT
| Weight | 150 lbs |
|---|---|
| Pumping Speed | 1,600 l/s |
| Ultimate Pressure | < 5 x 10-8 mbar |
Agilent Varian Turbo-V 2K-G Turbomolecular Vacuum Pump - REBUILT
The Varian Turbo-V 2K-G turbo pump is a dedicated pumping system designed for the Plasma process industry. Its pumping stages and pump structure are optimized to work with very high Ar gas flows and temperatures. The 2K-G is the first pump to fully integrate both purge and vent valves into the pump casing. They are actuated directly by the integrated electronics and nothing hangs out of the pump. They are protected from external shocks and contamination, granting for maximum lifetime. View our inventory of Varian turbo pumps.
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| Pumping speed (w/out inlet screen) N2 Ar |
1,600 l/s 1,400 l/s |
| Compression ratio N2 Ar |
3 x 105 6 x 105 |
| Base pressure w/ recommended forepump | 5 x 10-8 mbar (4 x 10-8 Torr) (According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the completion of test dome bake-out, with a turbopump fitted with a ISO-250 flange and using the recommended pre-vacuum pump) |
| Inlet flange | ISO-250F |
| Foreline flange | KF-40 NW |
| Nominal rotational speed | 33,000 rpm |
| Start up time | < 7 minutes |
| Recommended forepump | > 40 m3/h |
| Operating position | Any |
| Operating ambient temperature | 5°C to 40°C |
| Maximum flange temperature | no process: 80°C process: 50°C |
| Max rotor temperature | 120°C |
| Vibration level (displacement) | < 0.01 μm at inlet flange |
| Cooling requirements | Water |
| Coolant water | Minimum flow: 200 l/h (0.89 GPM) Temperature: +10°C to +35°C Pressure: 3 to 5 bar (45 to 75 psi) |
| Noise level | < 45 dB(A) at 1 meter |
| Power supply Input voltage Input freq. Max input power Stand-by power Max operating power |
208 – 240 VAC 50 – 60 Hz 850 VA 30 to 35 W 400 W for Nitrogen and lighter gases 390 W for Argon |
| Protection fuse | 2 x 8 A |
| Compliance with | EN 55011 (Radio disturbance characteristics) EN 61000-3-2 (Limits for harmonic current emissions) EN 61000-3-3 (Limitation of voltage changes, voltage fluctuations and flicker) EN 61000-6-2 and EN 61326 (Immunity for industrial environments) which recall: EN 61000-4-2 (Electrostatic discharge phenomena) EN 61000-4-3 (Radiated high-frequency phenomena) EN 61000-4-4, EN 61000-4-5, EN61000-4-6 (Conducted high-frequency phenomena) EN 61000-4-11 (Voltage fluctuation, voltage dips and short interruptions) |
| Installation Category | II |
| Pollution Degree | 2 |
| Max altitude | 2,000 m MSL |
| Power cable | w/ European or NEMA plug 3 meters long (optional) |
| Serial communication kit | RS232 cable w/ a 9-pin D type male connector and a 9- pin D type female connector, and Navigator software (optional) |
| Storage temperature | -20°C to 70°C |
| Environment protection | IP54 |
| Weight | 35 kg (77.16 lbs) |
| Type | Label | Description | Download |
|---|---|---|---|
|
Varian Turbo-V 2K-G - REBUILT | Instruction Manual | Download |
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