Advanced Energy Pinnacle PLUS+ 5kW 400V 3152438-104
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USED Advanced Energy AE Pinnacle PLUS+ 5kW 400V Pulsed-DC Power Supply 3152438-104
The Advanced Energy Pinnacle PLUS+ platform provides all of the advantages of a pulsed-DC solution for your reactive processes with ease of use and unmatched flexibility. The Pinnacle PLUS+ DC power supply offers high deposition rates with the benefits of significantly reduced variation and higher yields for both process and bias applications. This series features adjustable frequency range of 5 to 350 kHz, variable duty cycle up to 45% reverse time, high power operation with a single output all with a power factor of > .95 at 10kW.
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| Specifications | 5 kW, Single Output | 5 kW, Dual Output | 10 kW, Single Output |
|---|---|---|---|
| Max output power | 5 kW | 5 kW, independently controlled outputs | 10 kW |
| Voltage range | 325 to 650 VDC; optional 325 to 800 VDC output (wide Z) | ||
| Max current | 15.4 ADC | 15.4 ADC per output | 30.8 ADC |
| Input power connector | Five-terminal, DIN compression terminal block; maximum wire size: #6 AWG | ||
| Output connector | Two-terminal, multi-contact, pluggable connector with strain relief or UHF connector | ||
| Frequency | 5 to 350 kHz, variable | ||
| Reverse time | 0.4 to 5 ±s, variable; Optional 0.4 to 10 ±s range | ||
| Duty cycle | Up to 45% reverse time, variable | ||
| Reverse voltage | 10% of operating voltage (just prior to reversal) | ||
| Ignition capability | 1,500 VDC max, 1,350 VDC typical | ||
| Regulation modes | Power, voltage, or current | ||
| Repeatability | From run to run at constant set point: 0.1% from 10 to 100% of rated power | ||
| AC line voltage | 200/208 or 400 or 480 VAC | ||
| Current | 200/208 VAC: 17 A nominal per φ 400 VAC: 8.5 A nominal per φ 480 VAC: 7.5 A nominal per φ |
200/208 VAC: 35 A nominal per φ 400 VAC: 17 A nominal per φ 480 VAC: 15 A nominal per φ |
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| Regulatory compliance | CE, NRTL on certain models | ||
| Ground reference | Negative, positive, or floating output up to 1,500 VDC with respect to ground or terminal to terminal | ||
| Analog interface options | 37-pin isolated (to 500 VRMS), 0 to 10 VDC analog, 0/24 VDC digital 37-pin, 0 to 10 VDC or 0 to 5 VDC isolated analog, 0/15 VDC digital 37-pin, 0 to 10 VDC or 0 to 5 VDC non-isolated analog, 0/15 VDC digital |
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| Serial communication options | RS-232, RS-422, RS-485 (selectable baud rates up to 57.6 k): AE Bus protocol; ASCII protocol (MDX and emulation) Profibus (selectable baud rates of 1.5 MB or 12 MB); AE Bus protocol DeviceNet± option available |
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| Accessory | Remote, active monitor/control panel | ||
| Weight | 21.4 kg (47 lb) | 30 kg (66 lb) | |
| Max recommended output cable length | 10 m (32.8') RG393 or equivalent | ||
| Cooling medium | Air | ||
| Input power connector | Five-terminal, DIN compression terminal block; maximum wire size: #6 AWG | ||
| Output connector | Two-terminal, multi-contact, pluggable connector with strain relief or UHF connector | ||
Need modifications to this item? PTB Sales' expert team of engineers can configure products to your specific needs.
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